中国电子科技集团公司第五十四研究所;
针对传统的分布式射频(RF)微机电系统(MEMS)移相器结构可靠性较低、平面面积较大、对制作工艺要求较高的问题,设计了一种新型5位分布式RF MEMS移相器,对其螺旋形共面波导结构和31个MEMS开关组进行了简要介绍及仿真分析。移相器体积为2.6 mm×2.6 mm×0.505 mm,工作频率为40 GHz时,31个仿真相移量与设计目标相移量的误差小于3.72°,满足高频、小面积、低损耗和低成本的MEMS相控阵系统应用的需求。
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基本信息:
DOI：
中图分类号:TN623
引用信息:
[1]张晓桐,董自强,张松等.一种新型螺旋形分布式RF MEMS移相器的设计[J].无线电工程,2019,49(08):727-732.
基金信息:
海洋公益行业科研专项经费基金资助项目(201305028)